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Fabrication and Design of Resonant Microdevices

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This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry. Offers numerous academic and industrial examples of resonant MEMS Provides an analytic model of device behaviour Explains two-port systems in detail Devotes ample space to excitation and signal detection methods Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

Informacija

Autorius: Behraad Bahreyni
Leidėjas: William Andrew
Išleidimo metai: 2008
Knygos puslapių skaičius: 250
ISBN-13: 9780815515777
Formatas: 6.9 x 0.8 x 10 inches. Knyga kietu viršeliu
Kalba: Anglų

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