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Surface Metrology for Micro- And Nanofabrication

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Knygos aprašymas

Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication. Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components Assesses the best techniques for repairing micro-defects

Informacija

Autorius: Wei Gao
Leidėjas: Elsevier
Išleidimo metai: 2020
Knygos puslapių skaičius: 448
ISBN-13: 9780128178508
Formatas: 7.52 x 1.02 x 9.25 inches. Knyga minkštu viršeliu
Kalba: Anglų

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